Microfabricated pump

Details Microfabricated pump Microfabricated pump

1990-03-22

1992-03-17

Rivell, John

Pumps

Motor driven

Magnetostrictive chamber

417413, 417474, F04B 4314, F04B 1700

Patent

active

050963880

ABSTRACT:
A micro machined micro pump capable of flow rates on the level of microliters per minute formed by micro machining of a semiconductor material such as silicon with a set of channels or passages and having a semiconductor membrane interacting with the pattern of channels and passages and under selective control of activating means to induce traveling wave type motion of said membrane that creates pump action between inlet and outlet ones of the passages. To induce the pump action motion of the membrane electrical conductors can be applied to the membrane in a pattern which, when selectively activated interact with an electric or magnetic field to produce such motion. Alternatively piezolelectric or other electrostrictive mechanisms may be employed to induce the appropriate membrane motion.

REFERENCES:
patent: 2971471 (1961-02-01), Huebschman
patent: 3264998 (1966-08-01), Dingman
patent: 4515534 (1985-05-01), Lawless et al.
patent: 4911616 (1990-03-01), Laumann, Jr.

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