Liquid purification or separation – Casing divided by membrane into sections having inlet – Planar membrane
Patent
1997-05-02
1999-09-07
Drodge, Joseph W.
Liquid purification or separation
Casing divided by membrane into sections having inlet
Planar membrane
210490, 21050026, 21050022, 216 56, 422101, 427245, B01D 7102, B01D 6906, B01D 7104
Patent
active
059482559
ABSTRACT:
A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.
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Ferrari Mauro
Keller Christopher G.
Drodge Joseph W.
The Regents of the University of California
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