Microfabricated miniature grids

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With thin active central semiconductor portion surrounded by...

Reexamination Certificate

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Details

C257SE29001, C250S281000, C250S286000, C250S287000, C313S348000, C438S459000, C438S977000

Reexamination Certificate

active

11124424

ABSTRACT:
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.

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