Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With thin active central semiconductor portion surrounded by...
Reexamination Certificate
2008-04-15
2008-04-15
Tran, Minhloan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Physical configuration of semiconductor
With thin active central semiconductor portion surrounded by...
C257SE29001, C250S281000, C250S286000, C250S287000, C313S348000, C438S459000, C438S977000
Reexamination Certificate
active
11124424
ABSTRACT:
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
REFERENCES:
patent: 3999263 (1976-12-01), Marshall et al.
patent: 4150319 (1979-04-01), Nowak et al.
patent: 5465480 (1995-11-01), Karl et al.
patent: 6013913 (2000-01-01), Hanson
patent: 6291922 (2001-09-01), Dhuler
patent: 6662439 (2003-12-01), Bhullar
patent: 6905614 (2005-06-01), Novotny
patent: 6977381 (2005-12-01), Charles et al.
patent: 7064637 (2006-06-01), Tactic-Lucic et al.
patent: 2001/0052576 (2001-12-01), Shimade et al.
patent: 2001/0054690 (2001-12-01), Shimada et al.
patent: 2002/0118850 (2002-08-01), Yeh et al.
patent: 2004/0060898 (2004-04-01), Tsai
patent: WO 2004/097879 (2004-04-01), None
Jaeger, Introduction to Microelectronic Fabrication, 2002, Prentice Hall, 2nd Edition, pp. 2 and 3.
Honkanen, A., et al., “Gas-silicon detector telescope for charged particle spectroscopy,”Nuclear Instrument and Methods in Physics Research A, 395:217-225 (1997).
Vlasak, P.R., et al., “An interleaved comb ion deflection gate form/zselection in time-of-flight mass spectrometry,”Rev. Sci. Instrum. 67(1):68-72 (1996).
Collins Scott
Frederick Brian G.
LeGore Lawrence J.
Smith Rosemary
Rodela Eduardo A
Stillwater Scientific Instruments
Tran Minhloan
University of Maine
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