Microfabricated fluidic devices

Details Microfabricated fluidic devices Microfabricated fluidic devices

1994-11-03

1998-08-04

Thorpe, Timothy

Pumps

Motor driven

Electric or magnetic motor

417417, 4174231, 4174103, F04B 1703

Patent

active

057884684

ABSTRACT:
A microfabricated, remotely actuated fluid pump includes a LIGA-fabricated movable member disposed within a cavity. The LIGA-fabricated movable member and the cavity cooperate to (a) define a sufficiently small clearance therebetween to achieve effective pumping action while (b) presenting a sufficiently low-friction fit to enable remote actuation. Such a pump can take the form of a piston pump, a vane pump, a centrifugal pump, a gear pump, etc. Other fluidic devices including flow sensors, piston valves, hydraulic motors, nozzles, and connectors can be fabricated using similar principles.

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