Microfabricated filter and capsule using a substrate sandwich

Details Microfabricated filter and capsule using a substrate sandwich Microfabricated filter and capsule using a substrate sandwich

1997-04-15

1999-08-17

Drodge, Joseph W.

Liquid purification or separation

Filter

Supported, shaped or superimposed formed mediums

216 2, 216 56, 21050022, 21050026, 424424, 424451, 6048901, B01D 6910, B01D 7102, A61K 952

Patent

active

059389230

ABSTRACT:
A microfabricated filter made up of two bonded substrate structures, each consisting of single crystalline silicon can optionally be formed into a capsule. The pores of the filter consist of one or more channels disposed between the two substrate structures. The width of the channels are defined by a thickness of a sacrificial layer formed on one of the substrate structures. The filter includes pores having a precisely controlled pore width which may be as small as 5 nanometers. The filter provides a relatively high mechanical strength relative to filters having polycrystalline silicon structures and also has a high throughput and can be modified to have high resistance to adsorption of particles.

REFERENCES:
patent: 3502455 (1970-03-01), Gardner et al.
patent: 3791987 (1974-02-01), Fanger
patent: 3936329 (1976-02-01), Kendall et al.
patent: 3962052 (1976-06-01), Abbas et al.
patent: 4063271 (1977-12-01), Bean et al.
patent: 4077885 (1978-03-01), van Heuven et al.
patent: 4473476 (1984-09-01), Mc Millan et al.
patent: 4689150 (1987-08-01), Abe et al.
patent: 4743545 (1988-05-01), Torobin
patent: 4793825 (1988-12-01), Benjamin et al.
patent: 4797211 (1989-01-01), Enrfeld et al.
patent: 4874484 (1989-10-01), Foell et al.
patent: 4978421 (1990-12-01), Bassous et al.
patent: 4981590 (1991-01-01), Van 'T Veen et al.
patent: 5131978 (1992-07-01), O'Neill
patent: 5225123 (1993-07-01), Torobin
patent: 5234594 (1993-08-01), Tonucci et al.
patent: 5262021 (1993-11-01), Lehmann et al.
patent: 5304487 (1994-04-01), Wilding et al.
patent: 5393375 (1995-02-01), MacDonald et al.
patent: 5543046 (1996-08-01), Van Rijn
patent: 5585011 (1996-12-01), Saaski et al.
patent: 5603953 (1997-02-01), Herbing et al.
patent: 5651900 (1997-07-01), Keller et al.
patent: 5770076 (1998-06-01), Chu et al.
patent: 5792354 (1998-08-01), Aksberg
patent: 5798042 (1998-08-01), Chu et al.
"Process for Producing a Precision Filter", IBM Technical Disclosure Bulletin, vol. 32, No. 4A Sep. 1989, Undated.
Bergqvist et al., "A New Condenser Microphone in Silicon", Sensors and Actuators, A21-A23, 1990, pp. 123-125.
Bourouina et al., "A new condenser microphone with a p.sup.+ silicon membrane", Sensors and Actuators, Jan. 31, 1992, pp. 149-152.
E. Graf et al., "Silicon membrane condenser microphone with integrated field-effect transistor", Sensors and Actuators, 1993, pp. 708-711.
J.Brody, "A Planar Microfabricated Fluid Filter", 8th International Conference on Solid-State Sensors and Actuators, Jun. 25-29, 1995, pp. 779-782.
G.Kittilsland et al., "A Sub-micron Particle Filter in Silicon", Sensors and Actuators, 1990, pp. 904-907.
W.Lang et al., "Application of Porous Silicon as a Sacrificial Layer", 7th International Conference on Solid-State Sensors and Actuators Digest of Technical Papers, Jun. 7-10, 1993, pp. 202-205.
D.Pearson et al., "Nanochannel Glass Replica Membranes," Science, vol. 270, Oct. 6, 1995, pp. 68-69.

Affiliated with

Also associated with

Rating

Microfabricated filter and capsule using a substrate sandwich does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microfabricated filter and capsule using a substrate sandwich, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfabricated filter and capsule using a substrate sandwich will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-312154