Microfabricated elastomeric valve and pump systems

Details Microfabricated elastomeric valve and pump systems Microfabricated elastomeric valve and pump systems

2000-06-27

2009-10-13

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Forming or treating article containing magnetically...

C216S033000, C216S052000, C264S239000

Reexamination Certificate

active

07601270

ABSTRACT:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

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