Microfabricated elastomeric valve and pump systems

Details Microfabricated elastomeric valve and pump systems Microfabricated elastomeric valve and pump systems

2007-05-15

2007-05-15

Chambers, A. Michael (Department: 3753)

Fluid handling

Flow affected by fluid contact, energy field or coanda effect

Structure of body of device

C137S803000, C137S807000, C137S824000, C137S565160

Reexamination Certificate

active

11056451

ABSTRACT:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

REFERENCES:
patent: 3495608 (1970-02-01), O'Keefe
patent: 3570515 (1971-03-01), Kinner
patent: 3747628 (1973-07-01), Holster et al.
patent: 4046159 (1977-09-01), Pegourie
patent: 4119368 (1978-10-01), Yamazaki
patent: 4153855 (1979-05-01), Feingold
patent: 4245873 (1981-01-01), Boutoillo et al.
patent: 4434704 (1984-03-01), Surjaatmadja
patent: 4848722 (1989-07-01), Webster
patent: 4898582 (1990-02-01), Faste
patent: 4992312 (1991-02-01), Frisch
patent: 5085582 (1992-02-01), Van Lintel
patent: 5088515 (1992-02-01), Kamen
patent: 5096388 (1992-03-01), Weinberg
patent: 5126115 (1992-06-01), Fujita et al.
patent: 5164558 (1992-11-01), Huff et al.
patent: 5171132 (1992-12-01), Miyazaki
patent: 5224843 (1993-07-01), van Lintel
patent: 5259737 (1993-11-01), Kamisuki et al.
patent: 5265327 (1993-11-01), Faris et al.
patent: 5290240 (1994-03-01), Horres, Jr.
patent: 5336062 (1994-08-01), Richter
patent: 5346372 (1994-09-01), Naruse et al.
patent: 5375979 (1994-12-01), Trah
patent: 5376252 (1994-12-01), Ekstrom
patent: 5400741 (1995-03-01), DeTitta et al.
patent: 5423287 (1995-06-01), Usami et al.
patent: 5529465 (1996-06-01), Zengerle et al.
patent: 5593130 (1997-01-01), Hansson et al.
patent: 5642015 (1997-06-01), Whitehead et al.
patent: 5659171 (1997-08-01), Young et al.
patent: 5660370 (1997-08-01), Webster
patent: 5681024 (1997-10-01), Lisec et al.
patent: 5705018 (1998-01-01), Hartley
patent: 5759014 (1998-06-01), Van Lintel
patent: 5775371 (1998-07-01), Pan et al.
patent: 5788468 (1998-08-01), Dewa et al.
patent: 5836750 (1998-11-01), Cabuz
patent: 5842787 (1998-12-01), Kopf-Sill et al.
patent: 5875817 (1999-03-01), Carter
patent: 5876187 (1999-03-01), Afromowitz
patent: 5932799 (1999-08-01), Moles
patent: 5942443 (1999-08-01), Parce et al.
patent: 6007309 (1999-12-01), Hartley
patent: 6043080 (2000-03-01), Lipshutz et al.
patent: 6123769 (2000-09-01), Sanjoh
patent: 6155282 (2000-12-01), Zachary et al.
patent: 6174365 (2001-01-01), Sanjoh
patent: 6296673 (2001-10-01), Santarsiero et al.
patent: 6345502 (2002-02-01), Tai et al.
patent: 6409832 (2002-06-01), Weigl et al.
patent: 6767706 (2004-07-01), Quake et al.
patent: 6793753 (2004-09-01), Unger et al.
patent: 6899137 (2005-05-01), Unger et al.
patent: 6929030 (2005-08-01), Unger et al.
patent: 2001/0027745 (2001-10-01), Weigl et al.
patent: 2001/0033796 (2001-10-01), Unger et al.
patent: 2002/0029814 (2002-03-01), Unger et al.
patent: 2002/0037499 (2002-03-01), Quake et al.
patent: 2002/0144738 (2002-10-01), Unger et al.
patent: 2003/0019833 (2003-01-01), Unger et al.
patent: 0 592 094 (1994-04-01), None
patent: 0 703 364 (1996-03-01), None
patent: 0 829 360 (1996-03-01), None
patent: 0 706 004 (1996-04-01), None
patent: 0 779 436 (1997-06-01), None
patent: 0 845 603 (1998-06-01), None
patent: 0 999 055 (2000-05-01), None
patent: 2 155 152 (1985-09-01), None
patent: 2 306 460 (1997-06-01), None
patent: WO 98/07069 (1996-02-01), None
patent: WO 99/00655 (1999-01-01), None
patent: WO 99/04361 (1999-01-01), None
patent: WO 99/17093 (1999-04-01), None
patent: WO 99/52633 (1999-10-01), None
patent: WO 00/00678 (2000-01-01), None
patent: WO 00/43748 (2000-07-01), None
patent: WO 00/60345 (2000-10-01), None
patent: WO 01/09595 (2001-02-01), None
patent: WO 01/09595 (2001-02-01), None
“Biochips,” Nature Biotechnology, vol. 18, Supplement 2000, pp. IT43-IT44, 2000.
“Chapter 9: Microfluidic Devices,” Micromachined Transducers Sourcebook, pp. 779-882, 1998.
“Electro Microfluidic Dual In-Line Package (EMDIP),” Sandia National Laboratories, 2 pages, no date.
Anderson, Rolfe C. et al., “Microfluidic Biochemical Analysis System,” Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, pp. 477-480, Jun. 16-19, 1997.
Angell, James B. et al., “Silicon Micromechanical Devices,” Scientific American, pp. cover, 44-55, Apr. 1983.
Armani, Deniz et al., “Re-Configurable Fluid Circuits By PDMS Elastomer Micromachining,” IEEE Int. Conf. Micro Electro Mech. Syst. Tech. Digest, vol. 12, pp. 222-227, 1999.
Ballantyne, J. P. et al., “Selective Area Metallization By Electron-Beam Controlled Direct Metallic Deposition,” J. Vac. Sci. Technol., vol. 10, No. 6, pp. 1094-1097, Nov. 1973.
Bloomstein, T. M. et al., “Laser-Chemical Three-Dimensional Writing For Microelectromechanics And Application To Standard-Cell Microfluidics,” J. Vac. Sci. Technol. B, vol. 10, No. 6, pp. 2671-2674, Nov. 1992.
Bousse, Luc et al., “Electrokinetically Controlled Microfluidic Analysis Systems,” Annu. Rev. Biophys. Biomol. Struct., vol. 29, pp. 155-181, 2000.
Chou, Hou-Pu et al., “Integrated Elastomer Fluidic Lab-On-A-Chip-Surface Patterning And DNA Diagnostics,” Proceedings of the Solid State Actuator and Sensor Workshop, Hilton Head, South Carolina, 4 pages, 2000.
Chou, Hou-Pu et al., “Multiple Disease Diagnostics On A Single Chip,” Biophysics Lab, Caltech, pp. 1-4, Mar. 1, 2000.
Fettinger, J. C. et al., “Stacked Modules For Micro Flow Systems In Chemical Analysis: Concept And Studies Using An Enlarged Model,” Sensors and Actuators B, vol. 17, pp. 19-25, 1993.
Folch, A. et al., “Molding Of Deep Polydimethylslloxane Microstructures For Microfluidics And Biological Applications,” Journal of Biomechanical Engineering, vol. 121, pp. 28-34, Feb. 1999.
Galambos, Paul et al., “Electrical And Fluidic Packaging Of Surface Micromachined Elecro-Microfluidic Devices,” 8 pages, no date.
Greene, Chana, “Characterizing The Properties Of PDMS,” pp. 1-11, Summer 2000.
Guérin, L. J. et al., “Simple And Low Cost Fabrication Of Embedded Micro-Channels By Using A New Thick-Film Photoplastic,” Transducers '97 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, pp. 1419-1422, Jun. 18-19, 1997.
Hicks, Jennifer, “Genetics And Drug Discovery Dominate Microarray Research,” R&D Magazine, pp. 28-33, Feb. 1999.
Jo, Byung-Ho et al., “Fabrication Of Three-Dimensional Microfluidic Systems By Stacking Molded Polydimethylsiloxane (PDMS) Layers” SPIE, vol. 3877, pp. 222-229, Sep. 1999.
Jo, Byung-Ho et al., “Three-Dimensional Micro-Channel Fabrication In Polydimethylsiloxane (PDMS) Elastomer,” Journal of Microelectromechanical Systems, vol. 9, No. 1, pp. 76-81, Mar. 2000.
Kagan, C. R., “Organic-Inorganic Hybrid Materials As Semiconducting Channels In Thin-Film Field-Effect Transistors,” Science, vol. 286, pp. 945-947, Oct. 29, 1999.
Kapur, Ravi et al., “Fabrication And Selective Surface Modification Of 3-Dimensionally Textured Biomedical Polymers From Etched Silicon Substrates,” Journal of Biomedical Materials Research, vol. 33, pp. 205-216, 1996.
Khoo, Melvin et al., “A Novel Micromachined Magnetic Membrane Microfluid Pump,” pp. 1-4, no date.
Kim, Enoch et al., “Polymer Microstructures Formed By Moulding In Capillaries,” Nature, vol. 376, pp. 581-584, Aug. 17, 1995.
Kirk-Othmer, “Concise Encyclopedia of

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