Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
2007-01-30
2007-01-30
Olsen, Allan (Department: 1763)
Etching a substrate: processes
Forming or treating article containing magnetically...
C216S033000, C156S242000, C264S239000
Reexamination Certificate
active
10150895
ABSTRACT:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
REFERENCES:
patent: 3570515 (1971-03-01), Kinner
patent: 3747628 (1973-07-01), Holster et al.
patent: 4046159 (1977-09-01), Pegourie
patent: 4119368 (1978-10-01), Yamazaki
patent: 4153855 (1979-05-01), Feingold
patent: 4245673 (1981-01-01), Bouteille et al.
patent: 4434704 (1984-03-01), Surjaatmadja
patent: 4848722 (1989-07-01), Webster
patent: 4898582 (1990-02-01), Faste
patent: 4992312 (1991-02-01), Frisch
patent: 5085562 (1992-02-01), Van Lintel
patent: 5088515 (1992-02-01), Kamen
patent: 5096388 (1992-03-01), Weinberg
patent: 5126115 (1992-06-01), Fujita et al.
patent: 5164558 (1992-11-01), Huff et al.
patent: 5171132 (1992-12-01), Miyazaki
patent: 5224843 (1993-07-01), Van Lintel
patent: 5259737 (1993-11-01), Kamisuki et al.
patent: 5265327 (1993-11-01), Faris et al.
patent: 5290240 (1994-03-01), Horres, Jr.
patent: 5336062 (1994-08-01), Richter
patent: 5346372 (1994-09-01), Naruse et al.
patent: 5375979 (1994-12-01), Trah
patent: 5376252 (1994-12-01), Ekstrom
patent: 5400741 (1995-03-01), DeTitta et al.
patent: 5423287 (1995-06-01), Usami et al.
patent: 5529465 (1996-06-01), Zengerle et al.
patent: 5593130 (1997-01-01), Hansson et al.
patent: 5642015 (1997-06-01), Whitehead et al.
patent: 5659171 (1997-08-01), Young et al.
patent: 5660370 (1997-08-01), Webster
patent: 5681024 (1997-10-01), Lisec et al.
patent: 5705018 (1998-01-01), Hartley
patent: 5759014 (1998-06-01), Van Lintel
patent: 5775371 (1998-07-01), Pan et al.
patent: 5788468 (1998-08-01), Dewa et al.
patent: 5836750 (1998-11-01), Cabuz
patent: 5842787 (1998-12-01), Kopf-Sill et al.
patent: 5875817 (1999-03-01), Carter
patent: 5876187 (1999-03-01), Afromowitz et al.
patent: 5932799 (1999-08-01), Moles
patent: 5942443 (1999-08-01), Parce et al.
patent: 6007309 (1999-12-01), Hartley
patent: 6043080 (2000-03-01), Lipshutz et al.
patent: 6069392 (2000-05-01), Tai et al.
patent: 6123769 (2000-09-01), Sanjoh
patent: 6155282 (2000-12-01), Zachary et al.
patent: 6174365 (2001-01-01), Sanjoh
patent: 6296673 (2001-10-01), Santarsiero et al.
patent: 6345502 (2002-02-01), Tai et al.
patent: 6409832 (2002-06-01), Weigl et al.
patent: 6709604 (2004-03-01), Tai et al.
patent: 6767706 (2004-07-01), Quake et al.
patent: 6793753 (2004-09-01), Unger et al.
patent: 2001/0027745 (2001-10-01), Weigl et al.
patent: 2001/0033796 (2001-10-01), Unger et al.
patent: 2002/0029814 (2002-03-01), Unger et al.
patent: 2002/0144738 (2002-10-01), Unger et al.
patent: 2003/0019833 (2003-01-01), Unger et al.
patent: 0 592 094 (1994-04-01), None
patent: 0 703 364 (1996-03-01), None
patent: 0 706 004 (1996-04-01), None
patent: 0 779 436 (1997-06-01), None
patent: 0 829 360 (1998-03-01), None
patent: 0 845 603 (1998-06-01), None
patent: 0 999 055 (2000-05-01), None
patent: 2 155 152 (1985-09-01), None
patent: 2 308 460 (1997-06-01), None
patent: WO 98/07069 (1998-02-01), None
patent: WO 99/00655 (1999-01-01), None
patent: WO 99/04361 (1999-01-01), None
patent: WO 99/17093 (1999-04-01), None
patent: WO 99/52633 (1999-10-01), None
patent: WO 00/00678 (2000-01-01), None
patent: WO 00/43748 (2000-07-01), None
patent: WO 00/60345 (2000-10-01), None
patent: WO 01/09595 (2001-02-01), None
patent: WO 01/09595 (2001-02-01), None
Ahn et al., “Fluid Micropumps Based on Rotary Magnetic Actuators,” Proceedings of 1995 IEEE Micro Electro Mechanical Systems Workshop (MEMS '95), held in Amsterdam, Netherlands on Jan. 29-Feb. 2, 1995, pp. 408-412
Benard et al., “A Titanium-Nickel Shape-Memory Alloy Actuated Micropump,” Proceedings of Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, held in Chicago, Il., Jun. 16-19, 1997, 1:361-364.
Brechtel et al.; “Control of the electroosmotic flow by metal-salt-containing buffers”, J Chromatography A, 1995, pp. 97-105, vol. 716.
Bryzek et al.; “Micromachines on the March”, IEEE Spectrum, 1994, pp. 20-31, vol. 31, No. 5.
Buchaillot et al.; “Silicon nitride thin films Young's modulus determination by an optical non-destructive method”, Jpn. J Appl Phys, 1995, pp. L794-L797, vol. 36, No. 2:6B.
Chou et al. “A microfabricated device for sizing and sorting DNA molecules”, Applied Physical Sciences, Biophysics, Proc. Natl. Acad. Sci., 1999, pp. 11-13, vol. 96, U.S.A.
Delamarche et al.; “Patterned delivery of immunoglobulins to surfaces using microfluidic networks”, Science, 1997, pp. 779-781, vol. 276.
Duffy et al. “Patterning Electroluminescence Materials with Feature Sizes as Small as 5 μm Using Elastomeric Membranes as Masks for Dry Lift-Off”, Advanced Materials, 1999, pp. 546-552, vol. 11, No. 7.
Duffy et al. “Rapid Prototyping of Microfluidic Switches in Poly(dimethylsiloxane) and Their Actuation by Electro-Osmotic Flow” Journal of Microeng, 1999, pp. 211-217, vol. 9.
Duffy et al. “Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)”, Analytical Chemistry, 1998, pp. 4974-4984, vol. 70, No. 23.
Effenhauser et al.; “Integrated capillary electrophoresis on flexible silicone microdevices: Analysis of DNA restriction fragments and detection of single DNA molecules on microchips”, Anal. Chem, 1997, pp. 3451-3457, vol. 69.
Effenhauser et al.; “Integrated chip-based capillary electrophoresis”, Electrophoresis, 1997, pp. 2203-2213, vol. 18.
Fahrenberg et al. “A microvalve system fabricated by thermoplastic molding”, J Micromech Microeng, 1995, pp. 169-171, vol. 5.
Fu et al.; “A microfabricated fluorescence-activated cell-sorter”, Nature Biotechnology, 1999, pp. 1109-1111, vol. 17.
Gass et al., “Integrated flow-regulated silicon micropump,” Sensors and Actuators A Physical, 1994, p. 335-338, vol. 43.
Gerlach, T., “Pumping Gases by a Silicon Micro Pump with Dynamic Passive Valves,” Proceedings of Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, held in Chicago, Il., Jun. 16-19, 1997, pp. 357-360, vol. 1.
Goll et al., “Microvalves with bistable buckled polymer diaphragms,” J. Micromech. Microeng., 1996, pp. 77-79, vol. 6.
Gravesen et al.; “Microfluids- A Review”, Journal Micromech Microeng, 1993, pp. 168-192, vol. 3.
Harrison et al., “Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip,” Science, 1993, pp. 895-897, vol. 261.
Hornbeck et al., “Bistable Deformable Mirror Device,” Spatial Light Modulators and Applications 1988 Technical Digest Series, vol. 8, Postconference Edition, Summaries of papers presented at the Spatial Light Modulators and Applications Topical Meeting, Jun. 15-17, 1988, Optical Society of America, pp. 107-110.
Hosokawa et al., “Handling of Picoliter Liquid Samples in a Poly(dimethylsiloxane)-Based Microfluidic Device,” Anal. Chem., 1999, 71(20):4781-4785.
Ikuta et al., “Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography,” IEEE Kyushu Institute of Technology, 1994, pp. 1-6.
Jacobson et al., “High-speed separations on a microchip,”
Chou Hou-Pu
Quake Stephen R.
Scherer Axel
Thorsen Todd A.
Unger Marc A.
LandOfFree
Microfabricated elastomeric valve and pump systems does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microfabricated elastomeric valve and pump systems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfabricated elastomeric valve and pump systems will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3801017