Microfabricated diffusion source

Details Microfabricated diffusion source Microfabricated diffusion source

2003-05-12

2008-07-15

Warden, Jill (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C422S069000, C422S088000, C096S108000, C096S121000

Reexamination Certificate

active

07399449

ABSTRACT:
A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor, and an outlet to release the vapor into a gas stream. The microfabricated diffusion source can provide a calibration standard for a microanalytical system. The microanalytical system with an integral diffusion source can be fabricated with microelectromechanical systems technologies.

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