Microfabricated devices and method for fabricating...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

Reexamination Certificate

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C438S283000

Reexamination Certificate

active

08004021

ABSTRACT:
Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.

REFERENCES:
patent: 4278492 (1981-07-01), Cross et al.
patent: 5129262 (1992-07-01), White et al.
patent: 5189914 (1993-03-01), White et al.
patent: 5454904 (1995-10-01), Ghezzo et al.
patent: 5490034 (1996-02-01), Zavracky et al.
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5565625 (1996-10-01), Howe et al.
patent: 5605598 (1997-02-01), Greiff
patent: 5668303 (1997-09-01), Giesler et al.
patent: 5725729 (1998-03-01), Greiff
patent: 5760305 (1998-06-01), Greiff
patent: 5836203 (1998-11-01), Martin et al.
patent: 5932953 (1999-08-01), Drees et al.
patent: 5969250 (1999-10-01), Greiff
patent: 6091182 (2000-07-01), Takeuchi et al.
patent: 6192757 (2001-02-01), Tsang et al.
patent: 6223598 (2001-05-01), Judy
patent: 6257059 (2001-07-01), Weinberg et al.
patent: 6323580 (2001-11-01), Bernstein
patent: 6388789 (2002-05-01), Bernstein
patent: 6433401 (2002-08-01), Clark et al.
patent: 6455980 (2002-09-01), Bernstein
patent: 6457361 (2002-10-01), Takeuchi et al.
patent: 6506620 (2003-01-01), Scharf et al.
patent: 6511915 (2003-01-01), Mlcak
patent: 6577043 (2003-06-01), Tsukai et al.
patent: 6673694 (2004-01-01), Borenstein
patent: 6688158 (2004-02-01), Cunningham et al.
patent: 6777727 (2004-08-01), Dunn et al.
patent: 6778908 (2004-08-01), Martorana et al.
patent: 6790775 (2004-09-01), Fartash
patent: 6837097 (2005-01-01), Cunningham et al.
patent: 6851297 (2005-02-01), Cunningham et al.
patent: 6887391 (2005-05-01), Daneman et al.
patent: 6946314 (2005-09-01), Sawyer et al.
patent: 7000453 (2006-02-01), Cunningham et al.
patent: 7109633 (2006-09-01), Weinberg et al.
patent: 7118922 (2006-10-01), Bhansali et al.
patent: 7410811 (2008-08-01), Lin et al.
patent: 2002/0067106 (2002-06-01), Sunwoo et al.
patent: 2002/0115198 (2002-08-01), Nerenberg et al.
patent: 2003/0010745 (2003-01-01), Field
patent: 2003/0012693 (2003-01-01), Otillar et al.
patent: 2003/0020367 (2003-01-01), Maeda et al.
patent: 2003/0119220 (2003-06-01), Mlcak et al.
patent: 2003/0154031 (2003-08-01), Potyrailo et al.
patent: 2003/0194710 (2003-10-01), Yang
patent: 2004/0038195 (2004-02-01), Nerenberg et al.
patent: 2004/0043615 (2004-03-01), Yamamoto et al.
patent: 2004/0065638 (2004-04-01), Gogoi
patent: 2004/0159629 (2004-08-01), Busta
patent: 2004/0175300 (2004-09-01), Indermuhle et al.
patent: 2004/0197931 (2004-10-01), Indermuhle et al.
patent: 2005/0014306 (2005-01-01), Yao et al.
patent: 2005/0045276 (2005-03-01), Patel et al.
patent: 2005/0064619 (2005-03-01), Chavan et al.
patent: 2005/0148147 (2005-07-01), Keating et al.
patent: 2006/0286685 (2006-12-01), Miller et al.
patent: 1752663 (2007-02-01), None
patent: WO 2005/111426 (2005-11-01), None
Grate, et al., “Acoustic Wave Sensors,” Sensors Update, 1996, pp. 37-83.
The RF and Microwave Handbook, Chapter 6, “Passive Technologies,” Sections 6.1-6.5, CRC Press LLC, 2001, pp. 6-2-6-83.
R. M. White, “Direct Piezoelectric Coupling to Surface Elastic Waves,” Applied Physics Letters, vol. 7 (Dec. 15, 1965), pp. 314-316.
J. F. Dias et al., “Frequency/Stress Sensitivity of S.A.W. Resonators,” Electronics Letters, vol. 12, No. 22, Oct. 1976, pp. 580-582.
S. W. Wenzel, “Applications of Ultrasonic Lamb Waves,” dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of Philosophy in Engineering/Electrical Engineering and Computer Sciences, University of California at Davis (1992).
J. Neumeister et al., “A SAW Delay-line Oscillator as a High-resolution Temperature Sensor,” Sensors and Actuators, (Mar. 1990), pp. 670-672.
W. C. Tang, “Electrostatic Comb Drive for Resonant Sensor and Actuator Applications,” Ph.D. Thesis, Electrical Engineering and Computer Sciences, University of California Berkeley, Berkeley, CA, Nov. 1990.
R. L. Baer et al., “Phase Noise Measurements of Flexural Plate Wave Ultrasonic Sensors,” 1991 IEEE Ultrasonics Symposium, 1991, pp. 321-326.
J. W. Grate et al., “Flexural Plate Wave Devices for Chemical Analysis,” Analytical Chemistry, vol. 63, 1991, pp. 1552-1561.
Gianchandani et al., “A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices,” Journal of Microelectromechanical Systems, vol. 1, No. 2, Jun. 1992, pp. 77-85.
J. W. Grate et al., “Frequency-Independent and Frequency-Dependent Polymer Transitions Observed on Flexural Plate Wave Ultrasonic Sensors,” Analytical Chemistry, vol. 64, 1992, pp. 413-423.
Giesler et al., “Electrostatic excitation and capacitive detection of flexural plate-waves,” Sensors and Actuators A, vol. 36, 1993, pp. 113-119.
J. W. Grate et al., “Acoustic Wave Microsensors—Part I” Analytical Chemistry, vol. 65, No. 21, Nov. 1, 1993, pp. 940A-948A.
J. W. Grate et al., “Acoustic Wave Microsensors—Part II” Analytical Chemistry, vol. 65, No. 22, Nov. 15, 1993, pp. 987A-996A.
J. W. Grate et al., “Smart Sensor System for Trace Organophosphorus and Organosulfur Vapor Detection Employing a Temperature-Controlled Array of Surface Acoustic Wave Sensors, Automated Sample Preconcentration, and Pattern Recognition,” Analytical Chemistry, vol. 65, No. 14, Jul. 15, 1993, pp. 1868-1881.
E.H. Yang et al., Sensors and Actuators—Fabrication and dynamic testing of electrostatic actuators with p + silicon diaphragms, vol. 50 (1995), pp. 151-156.
K. R. Williams, et al., “Etch Rates for Micromachining Processing,” Journal of Microelectromechnical Systems, vol. 5, No. 4, Dec. 1996, pp. 256-269.
A. F. Collings et al., “Biosensors: recent advances,” Rep. Prog. Phys., vol. 60, 1997, pp. 1397-1445.
R. M. White, “Introductory Lecture—Acoustic interactions from Faraday's crispations to MEMS,” Faraday Discuss, vol. 107 (1997), pp. 1-13.
D. S. Ballantine, Jr. et al., “Acoustic Wave Sensors—Theory, Design, and Physico-Chemical Applications,” Academic Press, New York, 1997.
J. C. Pyun et al., “Development of a biosensor forE. colibased on a flexural plate wave (FPW) transducer,” Biosensors & Bioelectronics, vol. 13, 1998, pp. 839-845.
N. Yazdi et al., “Micromachined Inertial Sensors,” Proceedings of the IEEE, vol. 86, No. 8, Aug. 1998, pp. 1640-1659.
A. W. Wang et al., “A Silicon-based Immunoassay for Detection of Breast Cancer Antigens,” Sensors and Actuators B, vol. 49 (1998), pp. 13-21.
S. E. Cowan et al., “Ultrasonic Flexural-Plate-Wave Sensor for Detecting the Concentration of SettlingE. coliW3110 Cells,” Analytical Chemistry, vol. 71, No. 16, Aug. 15, 1999, pp. 3622-3625.
A. Janshoff et al., “Piezoelectric Mass-Sensing Devices as Biosensors—An Alternative to Optical Biosensors?,” Angew. Chem. Int. Ed., vol. 39, 2000, pp. 4005-4032.
J. Choi et al., “A new magnetic bead-based, filterless bio-separator with planar electromagnet surfaces for integrated bio-detection systems,” Sensors and Actuators B, vol. 68, 2000, pp. 34-39.
M. S. Weinberg et al., “Modeling Flexural Plate Wave Devices,” Journal of Microelectromechanical Systems, vol. 9, No. 3. (Sep. 2000), pp. 370-379.
B. Cunningham et al., “Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and app

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