Microfabricated cantilever ratchet valve, and method for using s

Details Microfabricated cantilever ratchet valve, and method for using s Microfabricated cantilever ratchet valve, and method for using s

1998-02-27

1999-10-26

Lee, Kevin

Fluid handling

Processes

251 11, 25112906, 25112902, F16K 3102

Patent

active

059709987

ABSTRACT:
A microfabricated valve includes a substrate with a fluid path. A main cantilever is positionable in a resting closed state to prevent fluid movement through the fluid path and a resting open state that allows fluid movement through the fluid path. A ratchet cantilever supports the main cantilever in either the resting closed state or the resting open state, such that the main cantilever does not have to be energized to maintain the resting closed state or the resting open state. A valve state transition mechanism selectively energizes the main cantilever or the ratchet cantilever during a valve state transition period to selectively transition between the resting open and closed states.

REFERENCES:
patent: 5323999 (1994-06-01), Bonne et al.
Jerman, "Electrically-Activated, Normally-Closed Diaphragm Valves", J. Micromech. Microeng., 4:210-216 (1994).
Wise, "A Multielectrode Microprobe for Biopotential Recording", Ph.D. Dissertation, Stanford University, May, 1969.

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