Microfabricated acoustic transducer with a multilayer electrode

Details Microfabricated acoustic transducer with a multilayer electrode Microfabricated acoustic transducer with a multilayer electrode

2007-09-20

2010-11-23

Tarcza, Thomas H (Department: 3662)

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

Reexamination Certificate

active

07839722

ABSTRACT:
In a capacitive membrane ultrasound transducer, one or more electrodes include multiple layers of conductive or semiconductive material. The layers may be positioned adjacent an insulator or cavity in an arrangement to reduce electrical degradation. For example, a conductive layer with less work function and less resistivity is spaced from an insulator by a conductive layer with more work function and more resistivity. The different layers of electrode material may provide for less electrical degradation due to the type of material used and relative location.

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English translation of German counterpart's Office Action dated Jul. 1, 2009 (German patent application No. 10 2008 046 860.6-54), 3 pages.

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