Microengineered diaphragm pressure switch

Details Microengineered diaphragm pressure switch Microengineered diaphragm pressure switch

1989-03-16

1990-10-23

Tolin, Gerald P.

Electricity: circuit makers and breakers

Fluid pressure

Diaphragm

200 83P, 357 26, 361283, H01H 3534

Patent

active

049654152

ABSTRACT:
A microengineered pressure actuated switch includes a domed diaphragm having a snap-action response between defined states (d.sub.1, d.sub.5) of the diaphragm. This response is to an applied pressure differential across the diaphragm. The diaphragm is supported on a substrate of semiconductor material. In a method of making such a switch, a layer of inorganic material is provided on one side of a substrate of semiconductor material. Semiconductor material is removed from the substrate such that a defined region of the layer is not in contact with the semiconductor material, this defined region forming the diaphragm. The layer of inorganic material is so stressed that after semiconductor material is removed, the layer assumes a domed configuration and incorporates a pre-bias in the direction of doming.

REFERENCES:
patent: 3689719 (1972-09-01), Phillips
patent: 3717861 (1973-02-01), Wright, Jr.
patent: 3723684 (1973-03-01), Greenwood
patent: 4365225 (1982-12-01), Olsen
patent: 4586109 (1986-04-01), Peters
patent: 4670969 (1987-06-01), Yamada
patent: 4672849 (1987-06-01), Hoshino
patent: 4784721 (1988-11-01), Holmen
patent: 4829822 (1989-05-01), Imai

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