Microelectronic wafer examination apparatus and method for...

Details Microelectronic wafer examination apparatus and method for... Microelectronic wafer examination apparatus and method for...

2006-04-11

2006-04-11

Garber, Charles (Department: 2856)

Measuring and testing

Testing of apparatus

Reexamination Certificate

active

07024954

ABSTRACT:
An apparatus is provided that includes a wafer examination stand configured to securely receive a wafer carrier. In addition, the apparatus may include a measurement device suspended above stand. In some cases, the stand may include a means for positioning the wafer carrier relative to the measurement device such that a portion of the measurement device is directly above the wafer carrier in a first predetermined position and directly above the microelectronic wafer in a second predetermined position. In any case, the stand may be used for the examination of a microelectronic wafer for any circumstance in which the wafer is placed within a wafer carrier ring. For example, the stand may be used for, but not limited to, measuring the protrusion of a microelectronic wafer relative to a carrier ring. Consequently, a method for measuring a protrusion of a microelectronic wafer relative to a carrier ring is also provided.

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