Microelectronic wafer examination apparatus and method for...

Measuring and testing – Testing of apparatus

Reexamination Certificate

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Reexamination Certificate

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07024954

ABSTRACT:
An apparatus is provided that includes a wafer examination stand configured to securely receive a wafer carrier. In addition, the apparatus may include a measurement device suspended above stand. In some cases, the stand may include a means for positioning the wafer carrier relative to the measurement device such that a portion of the measurement device is directly above the wafer carrier in a first predetermined position and directly above the microelectronic wafer in a second predetermined position. In any case, the stand may be used for the examination of a microelectronic wafer for any circumstance in which the wafer is placed within a wafer carrier ring. For example, the stand may be used for, but not limited to, measuring the protrusion of a microelectronic wafer relative to a carrier ring. Consequently, a method for measuring a protrusion of a microelectronic wafer relative to a carrier ring is also provided.

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patent: 6660651 (2003-12-01), Markle
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patent: 2004/0061779 (2004-04-01), Harless et al.
patent: 10340946 (1998-12-01), None
patent: 2000028538 (2000-01-01), None
patent: 366549 (1999-08-01), None

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