Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1990-09-21
1993-10-26
Hille, Rolf
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505701, 505702, 427 62, 257 35, 257 33, H01L 3922, B05D 512, H01B 1200
Patent
active
052566366
ABSTRACT:
A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An insitu method for depositing all three films on a substrate is provided which does not require annealing steps. The photolithographic process is used to separately pattern the high T.sub.c superconductor thin films.
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Clarke John
Kingston John J.
Wellstood Frederick C.
Hille Rolf
Martin Paul R.
Moss Kathleen S.
Ross Pepi
Saadat Mahshid
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