Microelectronic mechanical system and methods

Details Microelectronic mechanical system and methods Microelectronic mechanical system and methods

2006-01-31

2006-01-31

Wilczewski, M. (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S032000, C438S737000, C438S738000, C438S739000, C438S740000

Reexamination Certificate

active

06991953

ABSTRACT:
The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. A multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an etch resistant substrate. A patterned device layer, preferably comprising silicon nitride, is embedded in a sacrificial material, preferably comprising poly-silicon, and is disposed between the etch resistant substrate and the capping layer. Access trenches or holes are formed in to capping layer and the sacrificial material is selectively etched through the access trenches, such that portions of the device layer are release from sacrificial material. The etchant preferably comprises a noble gas fluoride NGF2x, (wherein NG=Xe, Kr or Ar: and where x=1, 2 or 3). After etching that sacrificial material, the access trenches are sealed to encapsulate released portions the device layer between the etch resistant substrate and the capping layer. The current invention is particularly useful for fabricating MEMS devices, multiple cavity devices and devices with multiple release features.

REFERENCES:
patent: 1525550 (1925-02-01), Jenkins
patent: 1548262 (1925-08-01), Freedman
patent: 1814701 (1931-07-01), Ives
patent: 2415226 (1947-02-01), Szikiai
patent: 2783406 (1957-02-01), Vanderhooft
patent: 2920529 (1960-01-01), Blythe
patent: 2991690 (1961-07-01), Grey et al.
patent: 3256465 (1966-06-01), Weissenstern et al.
patent: 3388301 (1968-06-01), James
patent: 3443871 (1969-05-01), Chitayat
patent: 3553364 (1971-01-01), Lee
patent: 3576394 (1971-04-01), Lee
patent: 3600798 (1971-08-01), Lee
patent: 3656837 (1972-04-01), Sandbank
patent: 3657610 (1972-04-01), Yamamoto et al.
patent: 3693239 (1972-09-01), Dix
patent: 3743507 (1973-07-01), Ih et al.
patent: 3752563 (1973-08-01), Torok et al.
patent: 3781465 (1973-12-01), Ernstoff et al.
patent: 3783184 (1974-01-01), Ernstoff et al.
patent: 3792916 (1974-02-01), Sarna
patent: 3802769 (1974-04-01), Rotz et al.
patent: 3811186 (1974-05-01), Larnerd et al.
patent: 3861784 (1975-01-01), Torok
patent: 3862360 (1975-01-01), Dill et al.
patent: 3871014 (1975-03-01), King et al.
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 3896338 (1975-07-01), Nathanson et al.
patent: 3915548 (1975-10-01), Opittek
patent: 3935499 (1976-01-01), Oess
patent: 3935500 (1976-01-01), Oess et al.
patent: 3938881 (1976-02-01), Biegelsen et al.
patent: 3941456 (1976-03-01), Schilz et al.
patent: 3942245 (1976-03-01), Jackson et al.
patent: 3943281 (1976-03-01), Keller et al.
patent: 3947105 (1976-03-01), Smith
patent: 3969611 (1976-07-01), Fonteneau
patent: 3980476 (1976-09-01), Wysocki
patent: 3991416 (1976-11-01), Byles et al.
patent: 4001663 (1977-01-01), Bray
patent: 4004849 (1977-01-01), Shattuck
patent: 4006968 (1977-02-01), Ernstoff et al.
patent: 4009939 (1977-03-01), Okano
patent: 4011009 (1977-03-01), Lama et al.
patent: 4012116 (1977-03-01), Yevick
patent: 4012835 (1977-03-01), Wallick
patent: 4017158 (1977-04-01), Booth
patent: 4020381 (1977-04-01), Oess et al.
patent: 4021766 (1977-05-01), Aine
patent: 4034211 (1977-07-01), Horst et al.
patent: 4034399 (1977-07-01), Drukier et al.
patent: 4035068 (1977-07-01), Rawson
patent: 4067129 (1978-01-01), Abramson et al.
patent: 4084437 (1978-04-01), Finnegan
patent: 4090219 (1978-05-01), Ernstoff et al.
patent: 4093346 (1978-06-01), Nishino et al.
patent: 4093921 (1978-06-01), Buss
patent: 4093922 (1978-06-01), Buss
patent: 4100579 (1978-07-01), Ernstoff
patent: 4103273 (1978-07-01), Keller
patent: 4126380 (1978-11-01), Borm
patent: 4127322 (1978-11-01), Jacobson et al.
patent: 4135502 (1979-01-01), Peck
patent: 4139257 (1979-02-01), Matsumoto
patent: 4143943 (1979-03-01), Rawson
patent: 4163570 (1979-08-01), Greenaway
patent: 4184700 (1980-01-01), Greenaway
patent: 4185891 (1980-01-01), Kaestner
patent: 4190855 (1980-02-01), Inoue
patent: 4195915 (1980-04-01), Lichty et al.
patent: 4205428 (1980-06-01), Ernstoff et al.
patent: 4211918 (1980-07-01), Nyfeler et al.
patent: 4223050 (1980-09-01), Nyfeler et al.
patent: 4225913 (1980-09-01), Bray
patent: 4249796 (1981-02-01), Sincerbox et al.
patent: 4250217 (1981-02-01), Greenaway
patent: 4250393 (1981-02-01), Greenaway
patent: 4256787 (1981-03-01), Shaver et al.
patent: 4257016 (1981-03-01), Kramer, Jr. et al.
patent: 4290672 (1981-09-01), Whitefield
patent: 4295145 (1981-10-01), Latta
patent: 4311999 (1982-01-01), Upton et al.
patent: 4327411 (1982-04-01), Turner
patent: 4327966 (1982-05-01), Bloom
patent: 4331972 (1982-05-01), Rajchman
patent: 4336982 (1982-06-01), Rector, Jr.
patent: 4338660 (1982-07-01), Kelley et al.
patent: 4343535 (1982-08-01), Bleha, Jr.
patent: 4346965 (1982-08-01), Sprague et al.
patent: 4348079 (1982-09-01), Johnson
patent: 4355463 (1982-10-01), Burns
patent: 4361384 (1982-11-01), Bosserman
patent: 4369524 (1983-01-01), Rawson et al.
patent: 4374397 (1983-02-01), Mir
patent: 4389096 (1983-06-01), Hori et al.
patent: 4391490 (1983-07-01), Hartke
patent: 4396246 (1983-08-01), Holman
patent: 4398798 (1983-08-01), Krawczak et al.
patent: 4400740 (1983-08-01), Traino et al.
patent: 4408884 (1983-10-01), Kleinknecht et al.
patent: 4414583 (1983-11-01), Hooker, III
patent: 4417386 (1983-11-01), Exner
patent: 4418397 (1983-11-01), Brantingham et al.
patent: 4420717 (1983-12-01), Wallace et al.
patent: 4422099 (1983-12-01), Wolfe
patent: 4426768 (1984-01-01), Black et al.
patent: 4430584 (1984-02-01), Someshwar et al.
patent: 4435041 (1984-03-01), Torok et al.
patent: 4440839 (1984-04-01), Mottier
patent: 4443819 (1984-04-01), Funada et al.
patent: 4443845 (1984-04-01), Hamilton et al.
patent: 4447881 (1984-05-01), Brantingham et al.
patent: 4454591 (1984-06-01), Lou
patent: 4456338 (1984-06-01), Gelbart
patent: 4460907 (1984-07-01), Nelson
patent: 4462046 (1984-07-01), Spight
patent: 4467342 (1984-08-01), Tower
patent: 4468725 (1984-08-01), Venturini
patent: 4483596 (1984-11-01), Marshall
patent: 4484188 (1984-11-01), Ott
patent: 4492435 (1985-01-01), Banton et al.
patent: 4503494 (1985-03-01), Hamilton et al.
patent: 4511220 (1985-04-01), Scully
patent: 4538883 (1985-09-01), Sprague et al.
patent: 4545610 (1985-10-01), Lakritz et al.
patent: 4556378 (1985-12-01), Nyfeler et al.
patent: 4558171 (1985-12-01), Gantley et al.
patent: 4561044 (1985-12-01), Ogura et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4567585 (1986-01-01), Gelbart
patent: 4571041 (1986-02-01), Gaudyn
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4577932 (1986-03-01), Gelbart
patent: 4577933 (1986-03-01), Yip et al.
patent: 4588957 (1986-05-01), Balant et al.
patent: 4590548 (1986-05-01), Maytum
patent: 4594501 (1986-06-01), Culley et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4623219 (1986-11-01), Trias
patent: 4636039 (1987-01-01), Turner
patent: 4636866 (1987-01-01), Hattori
patent: 4641193 (1987-02-01), Glenn
patent: 4645881 (1987-02-01), LeToumelin et al.
patent: 4646158 (1987-02-01), Ohno et al.
patent: 4649085 (1987-03-01), Landram
patent: 4649432 (1987-03-01), Watanabe
patent: 4652932 (1987-03-01), Miyajima et al.
patent: 4655539 (1987-04-01), Caulfield et al.
patent: 4660938 (1987-04-01), Kazan
patent: 4661828 (1987-04-01), Miller, Jr. et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 4663670 (1987-05-01), Ito et al.
patent: 4687326 (1987-08-01), Corby, Jr.
patent: 4698602 (1987-10-01), Armitage
patent: 4700276 (1987-10-01), Freyman et al.
patent: 4707064 (1987-11-01), Dobrowolski et al.
patent: 4709995 (1987-12-01), Kuribayashi et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4711526 (1987-12-01), Hennings et al.
patent: 4714326 (1987-12-01), Usui et al.
patent: 4717066 (1988-01-01), Goldenberg et al.
patent: 4719507 (1988-01-01), Bos
patent: 4721629 (1988-01-01), Sakai et al.
patent: 4722593 (1988-02-01), Shimazaki
patent: 4724467 (1988-02-01), Yip et al.
patent: 4728185 (1988-03-01), Thomas
patent: 4743091 (1988-05-01), Gelbart
patent: 4744633 (1988-05-01), Sheiman
patent: 4747671 (1988-05-01), Takahashi et al.
patent: 4751509 (1988-06

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