Microelectronic field ionizer and method of fabricating the same

Details Microelectronic field ionizer and method of fabricating the same Microelectronic field ionizer and method of fabricating the same

1988-06-10

1990-05-15

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

164 46, 313230, 3133621, H01J 2702

Patent

active

049260561

ABSTRACT:
A microelectronic field ionizer and alternate fabrication procedures for the same are described. The field ionizer has an array of small diameter gas outlets in the form of microvolcanos. A counterelectrode layer of material is provided on the microelectronic substrate, in the registration with the gas outlets.

REFERENCES:
patent: 3665241 (1972-05-01), Spinot et al.
patent: 3852595 (1974-12-01), Aberth
patent: 3970887 (1976-07-01), Smith et al.
patent: 4008412 (1977-02-01), Yuito et al.
patent: 4095133 (1978-06-01), Hoeberechts
patent: 4141405 (1979-02-01), Spindt
patent: 4193836 (1980-03-01), Youmans et al.
patent: 4205418 (1980-06-01), Przybylek
patent: 4253221 (1981-03-01), Cochran, Jr. et al.
patent: 4307507 (1981-12-01), Gray et al.

Affiliated with

Also associated with

Rating

Microelectronic field ionizer and method of fabricating the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microelectronic field ionizer and method of fabricating the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectronic field ionizer and method of fabricating the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-622935