Microelectronic field emission device with air bridge anode

Details Microelectronic field emission device with air bridge anode Microelectronic field emission device with air bridge anode

1991-03-26

1992-08-04

Yusko, Donald J.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313310, 313308, 313336, 313351, H01J 130

Patent

active

051362058

ABSTRACT:
A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge scanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photoresist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrated with the remainder of an integrated circuit.

REFERENCES:
patent: 3855499 (1974-12-01), Yamada et al.
patent: 4721885 (1988-01-01), Brodie
patent: 4943343 (1990-07-01), Bardai et al.
patent: 4983878 (1991-01-01), Lee et al.
patent: 4987377 (1991-01-01), Gray et al.
R. E. Williams, "Gallium Arsenide Processing Techniques", Tech House, Inc., Apr. 1985, pp. 334-339.
K. Skidmore, "Industry News-The Comeback of the Vacuum Tube: Will Semiconductor Versions Supplement Transistors?", Semiconductor International, Aug. 1988, pp. 15-18.
C. A. Spindt, et al. "Field Emission Array Development", 33rd Int'l Field Emission Symposium, Jul. 1986, pp. 1-11.

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