Microelectronic device and method for testing same

Details Microelectronic device and method for testing same Microelectronic device and method for testing same

1979-04-06

1981-01-06

Krawczewicz, Stanley T.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

29574, 324 73PC, 371 21, 371 25, G01R 3122

Patent

active

042439370

ABSTRACT:
A method for testing a microelectronic circuit to detect process defects which affect first and second characteristics of the circuit elements thereof. The circuit is formed on a semiconductor chip in proximity with an independent test element. The test element is not connected to and does not form a part of the circuit. The circuit elements are tested to detect process defects which affect the first characteristic thereof. The test element is tested to detect process defects which affect the second characteristics of both the circuit elements and the test element. The results of the test on the test element are relied on to determine the acceptability of the second characteristics of the circuit elements. The test on the test element for said second characteristic may be performed at the same time the circuit elements are being tested for said first characteristic.

REFERENCES:
patent: 3723873 (1973-03-01), Witteles
patent: 3815025 (1974-06-01), Jordan
patent: 3821645 (1974-06-01), Vinsani
patent: 3889188 (1975-06-01), Trindade
patent: 4150331 (1979-04-01), Lacher
patent: 4168432 (1979-09-01), Williams et al.
patent: 4176258 (1979-11-01), Jackson

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