Microelectronic device

Details Microelectronic device Microelectronic device

2007-07-31

2011-11-15

Menz, Laura M (Department: 2813)

Semiconductor device manufacturing: process

Having metal oxide or copper sulfide compound semiconductor...

C438S151000, C438S158000

Reexamination Certificate

active

08058096

ABSTRACT:
A thin film transistor is manufactured by a process including forming an oxide semiconductor channel, patterning the oxide semiconductor channel with a photolithographic process, and exposing the patterned oxide semiconductor channel to an oxygen containing plasma.

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