Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2007-12-25
2007-12-25
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
C073S774000, C073S763000, C438S050000
Reexamination Certificate
active
11143543
ABSTRACT:
A microelectromechanical systems stress sensor comprising a microelectromechanical systems silicon body. A recess is formed in the silicon body. A silicon element extends into the recess. The silicon element has limited freedom of movement within the recess. An electrical circuit in the silicon element includes a piezoresistor material that allows for sensing changes in resistance that is proportional to bending of the silicon element.
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Lawrence Livermore National Security LLC
Lee John H.
Lefkowitz Edward
Patel Punam
Scott Eddie E.
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