Microelectromechanical system sensor and method for using

Details Microelectromechanical system sensor and method for using Microelectromechanical system sensor and method for using

2007-08-07

2007-08-07

Lefkowitz, Edward (Department: 2862)

Electricity: measuring and testing

Magnetic

Magnetometers

Reexamination Certificate

active

10839095

ABSTRACT:
According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. The apparatus may also include a sensing portion coupled to the movable portion, and the movable portion and/or sensing portion may move in a direction normal to the substrate in response to a magnetic field.

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