Microelectromechanical system optical apparatus and method

Details Microelectromechanical system optical apparatus and method Microelectromechanical system optical apparatus and method

2007-05-29

2007-05-29

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave directional modulation

C359S225100

Reexamination Certificate

active

11080597

ABSTRACT:
A microelectromechanical systems (MEMS) apparatus (100) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member (101) that can be stopped at either of at least two positions by electrically neutral stops (105, 107). Depending upon the needs of a given application, these stops may all be fabricated using materials deposition and removal techniques or some, though not all, may comprise an attached component.

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