Microelectromechanical strain gauge with frequency detector

Details Microelectromechanical strain gauge with frequency detector Microelectromechanical strain gauge with frequency detector

2006-08-22

2006-08-22

Noori, Max (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

Reexamination Certificate

active

07093498

ABSTRACT:
A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm. A detector communicating with the flexible arm may detect the frequency of oscillation to provide, an indication of the transverse strain of the substrate.

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