Wave transmission lines and networks – Coupling networks – Electromechanical filter
Patent
1994-08-30
1996-07-16
Gensler, Paul
Wave transmission lines and networks
Coupling networks
Electromechanical filter
333189, H03H 900
Patent
active
055370837
ABSTRACT:
A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.
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Howe Roger T.
Lin Liwei
Nguyen Clark T.
Pigano Albert P.
Gambino Darius
Gensler Paul
Regents of the University of California
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