Microelectromechanical resonator and method for fabrication

Details Microelectromechanical resonator and method for fabrication Microelectromechanical resonator and method for fabrication

2007-03-22

2009-11-10

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

Reexamination Certificate

active

07616077

ABSTRACT:
A method is disclosed for the robust fabrication of a microelectromechanical (MEM) resonator. In this method, a pattern of holes is formed in the resonator mass with the position, size and number of holes in the pattern being optimized to minimize an uncertainty Δf in the resonant frequency f0of the MEM resonator due to manufacturing process variations (e.g. edge bias). A number of different types of MEM resonators are disclosed which can be formed using this method, including capacitively transduced Lamé, wineglass and extensional resonators, and piezoelectric length-extensional resonators.

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