Microelectromechanical (MEMS) switching apparatus

Details Microelectromechanical (MEMS) switching apparatus Microelectromechanical (MEMS) switching apparatus

2005-11-22

2005-11-22

Le, Don (Department: 2819)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000

Reexamination Certificate

active

06967548

ABSTRACT:
This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

REFERENCES:
patent: 6046659 (2000-04-01), Loo et al.
patent: 6069540 (2000-05-01), Berenz et al.
patent: 6188301 (2001-02-01), Kornrumpf et al.
patent: 6331257 (2001-12-01), Loo et al.

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