Microelectromechanical (MEMS)-based magnetostrictive magnetomete

Electricity: measuring and testing – Magnetic – Magnetometers

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3242441, 324260, G01R 3302

Patent

active

059989955

ABSTRACT:
A microelectromechanical-based magnetostrictive magnetometer that uses, as an active element, a commercial (001) silicon microcantilever coated with an amorphous thin film of the giant magnetostrictive alloy Terfenol-D and a compact optical beam deflection transduction scheme. A set of Helmholtz coils is used to create an ac magnetic excitation field for driving the mechanical resonance of the coated microcantilever. When the coated microcantilever is placed in a dc magnetic field, the dc field will change the amplitude at the mechanical resonance of the coated microcantilever thereby causing a deflection that can be measured. The magnetometer has been demonstrated with a sensitivity near 1 .mu.T.

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patent: 5552778 (1996-09-01), Schrott et al.
patent: 5623205 (1997-04-01), Tomita et al.
patent: 5739686 (1998-04-01), Naughton et al.

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