Electricity: measuring and testing – Magnetic – Magnetometers
Patent
1997-10-03
1999-12-07
Strecker, Gerard
Electricity: measuring and testing
Magnetic
Magnetometers
3242441, 324260, G01R 3302
Patent
active
059989955
ABSTRACT:
A microelectromechanical-based magnetostrictive magnetometer that uses, as an active element, a commercial (001) silicon microcantilever coated with an amorphous thin film of the giant magnetostrictive alloy Terfenol-D and a compact optical beam deflection transduction scheme. A set of Helmholtz coils is used to create an ac magnetic excitation field for driving the mechanical resonance of the coated microcantilever. When the coated microcantilever is placed in a dc magnetic field, the dc field will change the amplitude at the mechanical resonance of the coated microcantilever thereby causing a deflection that can be measured. The magnetometer has been demonstrated with a sensitivity near 1 .mu.T.
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patent: 5552778 (1996-09-01), Schrott et al.
patent: 5623205 (1997-04-01), Tomita et al.
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Ecelberger Scott A.
Givens Robert B.
Kistenmacher Thomas J.
Murphy John C.
Osiander Robert
Cooch Francis A.
Strecker Gerard
The Johns Hopkins University
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