Microelectromechanical magnetometer

Electricity: measuring and testing – Magnetic – Magnetometers

Reexamination Certificate

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C324S662000

Reexamination Certificate

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11250123

ABSTRACT:
An apparatus comprising a substrate and a MEM device. The MEM includes a comb capacitor and a magnetic element physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacitance of the comb capacitor. The apparatus also includes at least one spring physically connecting the magnetic element to the substrate.

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