Microelectromechanical machined array valve

Details Microelectromechanical machined array valve Microelectromechanical machined array valve

1996-10-25

1999-07-27

Rivell, John

Fluid handling

Systems

Dividing into parallel flow paths with recombining

137375, 25112906, 251331, G05D 706, F16K 714, F16K 3102

Patent

active

059273259

ABSTRACT:
A valve to allow digitally addressable flow controllers is provided. An array of micromachined valves having a range of flow capacities and individually addressable while functioning in an On/Off mode allows flow controllers and similar devices high resolution, linearity and reproducibility. The incorporation of diamond or diamond-like materials in all flow paths extends the application of the valves to corrosive materials and permits higher process temperatures and lower particulate generation.

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