Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2005-07-05
2005-07-05
Walberg, Teresa J. (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C073S073000, C422S098000, C422S088000, C422S068100, C219S385000
Reexamination Certificate
active
06914220
ABSTRACT:
A microelectromechanical heating apparatus and fluid preconcentrator device utilizing same wherein heating elements of the apparatus are sized and spaced to substantially uniformly heat a heating chamber within a heater of the apparatus. Tall, thermally-isolated heating elements are fabricated in Si using high aspect ratio etching technology. These tall heating elements have large surface area to provide large adsorbent capacity needed for high efficiency preconcentrators in a micro gas chromatography system (μGC). The tall heating elements are surrounded by air gaps to provide good thermal isolation, which is important for a low power preconcentrator in the μGC system.
REFERENCES:
patent: 4194108 (1980-03-01), Nakajima et al.
patent: 4277742 (1981-07-01), Kovac et al.
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4497685 (1985-02-01), Soclof
patent: 4500412 (1985-02-01), Takahasi et al.
patent: 4724356 (1988-02-01), Daehler
patent: 5464966 (1995-11-01), Gaitan et al.
patent: 5481110 (1996-01-01), Krishnaswamy et al.
patent: 5493177 (1996-02-01), Muller et al.
patent: 5864144 (1999-01-01), Laine
patent: 6171378 (2001-01-01), Manginell et al.
patent: 6265222 (2001-07-01), DiMeo, Jr. et al.
patent: 6527835 (2003-03-01), Manginell et al.
patent: 6705152 (2004-03-01), Routkevitch et al.
patent: 6762049 (2004-07-01), Zou et al.
patent: 2003/0027022 (2003-02-01), Arana et al.
patent: 2003/0233862 (2003-12-01), Wise et al.
patent: 8-184514 (1996-07-01), None
Ivanov, D., et al., Sputtered Silicate-Limit NASICON Thin Films For Electrochemical Sensors, Solid-State Ionics, Diffusion & Reactions, vol. 67, pp. 295-299, 1994.
Reay, Richard J., et al., Microfabricated Electrochemical Analysis System For Heavy Metal Detection, Sens. And Actuators B, vol. 34, pp. 450-455, 1996.
Bruschi, P., et al., A Micromachined Hotplate On A Silicon Oxide Suspended Membrane, Proc. of 2ndItalian Conference on Sensors and Microsystems, Rome, Italy, 1997, pp. 348-352.
Sberveglieri, G., et al., Silicon Hotplates For Metal Oxide Gas Sensor Elements, Microsystem Technologies 3, pp. 183-190, 1997.
De Moor, P., et al., The Fabrication and Reliability Testing of Ti/TiN Heaters, Proc. Spie, vol. 3874, pp. 284-293, 1999.
Li, B., et al., A New Multi-Function Thin-Film Microsensor Based on Ba1-xLaxTiO3, Smart Mater, Struct., vol. 9, pp. 498-501, 2000.
Solzbacher, F., et al., A Modular System of SiC-based Microhotplates For The Application in Metal Oxide Gas Sensors, Sens. and Actuators B, vol. 64, pp. 95-101, 2000.
Lee, DAE-SIK, et al., A Microsensor Array With Porous Tin Oxide Thin Films and Microhotplate Dangled By Wires in Air, Sens. And Actuators B, vol. 83, pp. 250-255, 2002.
Gotz, A., et al., Thermal and Mechanical Aspects For Designing Micromachined Low-Power Gas Sensors, J. Micromech. Microeng., vol. 7, pp. 247-249, 1997.
Kunt, Tekin A., et al., Optimization of Temperature Programmed Sensing For Gas Identification Using Micro-Hotplate Sensors, Sens. And Actuators B, vol. 53, pp. 24-43.
Rossi, Carole, et al., Realization And Performance of Thin SiO2/SiNxMembrane For Microheater Applications, Sens: and Actuators A, vol. 64, pp. 241-245, 1998.
Astie, S., et al., Silicon Oxynitride Membrane For Chemical Sensor Application, Proc. of Mat. Res. Soc. Symp. vol. 518, pp. 99-104, 1998.
Brida, S., et al., Low Power Silicon Microheaters For Gas Sensors, Proc. of 3rdItalian Conference On Sensors And Microsystems, Rome, Italy, pp. 377-382, 1999.
Vincenzi D., et al., Gas-Sensing Device Implemented On A Micromachined Membrane: A Combination of Thick-Film And Very Large Scale Integrated Technologies, J. Vac. Sci. Technol. B., vol. 18, pp. 2441-2445, 2000.
Rich, C.A., et al., An 8-Bit Microflow Controller Using Pneumatiically-Actuated Microvalves, Ph. D. Dissertation, The University of Michigan, 2000.
Najafi, Nader, et al., A Micromachined Ultra-Thin-Film Gas Detector, IEEE Trans. Electron Dev., vol. 41, pp. 1770-1777, 1994.
Patel, Sanjay V., et al., Survivability of A Silicon-Based Microelectronic Gas-Detector Structure For High-Temperature Flow Applications, Sens. And Actuators B, vol. 37, pp. 27-35, 1996.
Manginell, Ronald P., et al., Microfabrication of Membrane-Based Devices By HARSE And Combined HARSE/Wet Etching, Proc. Spie., vol. 3511, pp. 269-276, 1998.
Casalnuvo, Stephen A., et al., 1999 Joint Meeting EFTF-IEEE IFCS, Proc. of The 1999 Joint Meeting of The European Frequency And Time Forum And The IEEE International Frequency Control Symposium, vol. 2, Besancon, France, pp. 991-996, 1999.
Manginell, Ronald P., et al., Microfabricated Planar Preconcentrator, Proc. IEEE Solid-State Sensor And Actuator Workshop, Hilton Head, SC, pp. 179-182, Jun. 2000.
Pang Stella W.
Tian Wei-Cheng
Zellers Edward T.
Brooks & Kushman P.C.
The Regents of the University of Michigan
Walberg Teresa J.
LandOfFree
Microelectromechanical heating apparatus and fluid... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microelectromechanical heating apparatus and fluid..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical heating apparatus and fluid... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3372822