Microelectromechanical floating element flow sensor

Details Microelectromechanical floating element flow sensor Microelectromechanical floating element flow sensor

2005-11-22

2005-11-22

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Volume or rate of flow

Reexamination Certificate

active

06966231

ABSTRACT:
An electromechanical floating element shear-stress sensor, which may also be referred to as a flow rate sensor, having one or more transduction mechanisms coupled to a support arm of a floating element wafer such that the transduction mechanisms are normal to the force applied to a top surface of the floating element. The transduction mechanisms may be generally attached to a side surface of one or more arms supporting the floating element and may be coupled together and to a processor using one or more contacts extending from the backside of the floating element sensor. Thus, the floating element shear-stress sensor may have an unobstructed surface past which a fluid may flow. The floating element may also include a temperature sensing system for accounting for affects of temperature on the floating element system.

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