Microelectromechanical device with perpendicular motion

Valves and valve actuation – Heat or buoyancy motor actuated

Reexamination Certificate

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Details

C251S129060

Reexamination Certificate

active

07011288

ABSTRACT:
A microelectromechanical device wherein the displacement of an electrothermally compliant actuator is perpendicular to a mounting substrate allowing in a first embodiment a fluid control valve to be opened and closed and in a second embodiment a plurality of electrical contacts to be opened and closed. The electrothermally compliant actuator is comprised of a pair of beam structures having a joined thick beam and then beam such that a flow of electrical current causes the beam structures to bend. A flexible isolation layer is used to thermally isolate the electrothermally compliant actuator from the fluid in another valve assembly embodiment.

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