Optical: systems and elements – Optical modulator – Light wave directional modulation
Reexamination Certificate
2005-01-18
2005-01-18
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave directional modulation
C359S290000, C359S291000
Reexamination Certificate
active
06844960
ABSTRACT:
An electrostatic micromechanical device with continuously variable displacement, that includes: a movable member having a first electrode; an opposing surface having a second electrode; a channel separating the movable member from the opposing surface; a liquid situated in the channel, wherein the liquid has a sufficiently high dielectric constant so as to enable continuously variable and stable control of a displacement of the movable member over a travel range spanning at least half of the channel; the displacement being a result of a voltage applied between the first electrode and the second electrode; and at least one solid dielectric layer physically situated between the first electrode and the second electrode.
REFERENCES:
patent: 6144481 (2000-11-01), Kowarz et al.
patent: 6210326 (2001-04-01), Ehwald
patent: 6215579 (2001-04-01), Bloom et al.
patent: 6284149 (2001-09-01), Li et al.
patent: 6286943 (2001-09-01), Ashe et al.
patent: 6307663 (2001-10-01), Kowarz
patent: 6329738 (2001-12-01), Hung et al.
patent: 6356248 (2002-03-01), Martin et al.
patent: 6362018 (2002-03-01), Xu et al.
patent: 6379929 (2002-04-01), Burns et al.
patent: 6419335 (2002-07-01), Gooray et al.
patent: 6575020 (2003-06-01), de Charmoy Grey et al.
patent: 6599781 (2003-07-01), Li
patent: 20010051408 (2001-12-01), Chiu
patent: 20020159701 (2002-10-01), Katayama et al.
Elmer S. Hung and Stephen D. Senturia, “Extending the Travel Range of Analog-Tuned Electrostatic Actuators” Journal of Microelectromechanical Systems, vol. 8, No. 4, Dec. 1999.
Michael S.-C. Lu, et al., “Closed-Loop Control of a Parallel-Plate Microactuator Beyond the Pull-in Limit” Solid-State Sensor, Actuator and Microsystems Workshop, Jun. 2-6, 2002, pp. 255-258.
Eastman Kodak Company
Mack Ricky
Shaw Stephen H.
Thomas Brandi
LandOfFree
Microelectromechanical device with continuously variable... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microelectromechanical device with continuously variable..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical device with continuously variable... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3366491