Microelectromechanical device with continuously variable...

Optical: systems and elements – Optical modulator – Light wave directional modulation

Reexamination Certificate

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C359S290000, C359S291000

Reexamination Certificate

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06844960

ABSTRACT:
An electrostatic micromechanical device with continuously variable displacement, that includes: a movable member having a first electrode; an opposing surface having a second electrode; a channel separating the movable member from the opposing surface; a liquid situated in the channel, wherein the liquid has a sufficiently high dielectric constant so as to enable continuously variable and stable control of a displacement of the movable member over a travel range spanning at least half of the channel; the displacement being a result of a voltage applied between the first electrode and the second electrode; and at least one solid dielectric layer physically situated between the first electrode and the second electrode.

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