Microelectromechanical device for controlled movement of a...

Pumps – Processes

Reexamination Certificate

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C417S207000, C417S208000, C137S828000

Reexamination Certificate

active

06869273

ABSTRACT:
A microelectromechanical (MEM) device for controlled movement of a fluid. The device includes a chamber having a heating element, an inlet, and a constricted egress channel.

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