Microelectromechanical device and method for producing it

Details Microelectromechanical device and method for producing it Microelectromechanical device and method for producing it

2006-08-01

2006-08-01

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C438S055000, C438S445000

Reexamination Certificate

active

07084502

ABSTRACT:
A microelectromechanical device and a method for producing it having at least one layer on a substrate, in particular a thermoelectric layer on a substrate, the thermal expansion coefficient of the at least one layer and the thermal expansion coefficient of the substrate differing greatly. The at least one layer is coupled to at least one stress reduction means for the targeted reduction of lateral mechanical stresses present in the layer. This achieves a stress-free layer or enables stress-free growth.

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patent: 101 11 185 (2002-06-01), None
patent: 1079445 (2001-02-01), None

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