Microelectromechanical capacitive device

Details Microelectromechanical capacitive device Microelectromechanical capacitive device

2011-07-19

2011-07-19

Caputo, Lisa M (Department: 2855)

Measuring and testing

Dynamometers

Responsive to force

C324S660000, C324S661000

Reexamination Certificate

active

07980145

ABSTRACT:
Methods and devices based on a microelectromechanical capacitive sensor are disclosed. In one embodiment, a method for fabricating an electromechanical capacitive device includes forming a housing of the electromechanical capacitive device using a non-conductive material and applying a conductive material on one or more areas on the housing to form one or more pairs of conductor plates.

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