Microelectromechanical cantilever acoustic sensor

Details Microelectromechanical cantilever acoustic sensor Microelectromechanical cantilever acoustic sensor

1998-02-19

1999-07-20

Chapman, John E.

Measuring and testing

Vibration

By mechanical waves

73632, 367103, G01H 1106

Patent

active

059258225

ABSTRACT:
A microelectromechanical sensor for detecting acoustic signals propagating through the ground, including reflected signals, has a cantilever provided with capacitance measurement to detect deflection or twisting of the cantilever due to the presence of acoustic signals. The cantilever size and shape may be changed to increase sensitivity to a particular frequency. An array of sensors may be used to detect buried objects, such as land mines.

REFERENCES:
patent: 4429575 (1984-02-01), Akishika
patent: 5077697 (1991-12-01), Chang
patent: 5357063 (1994-10-01), House et al.
patent: 5412988 (1995-05-01), Neff et al.
patent: 5563848 (1996-10-01), Rogers et al.
patent: 5808969 (1998-09-01), Arnaud et al.

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