Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2007-05-15
2007-05-15
Nguyen, Khai M. (Department: 2819)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S194000, C333S195000, C333S196000, C330S310000
Reexamination Certificate
active
11037307
ABSTRACT:
Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.
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Ma Qing
Shim Dong S.
Intel Corporation
Nguyen Khai M.
Schwegman Lundberg Woessner & Kluth P.A.
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