Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2005-08-23
2005-08-23
Tokar, Michael (Department: 2819)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S194000, C333S195000, C310S31300R
Reexamination Certificate
active
06933808
ABSTRACT:
Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.
REFERENCES:
patent: 3999153 (1976-12-01), Borner
patent: 4155056 (1979-05-01), Cross et al.
patent: 5537083 (1996-07-01), Lin et al.
patent: 6307452 (2001-10-01), Sun
patent: 6391675 (2002-05-01), Ehmke et al.
patent: 6393913 (2002-05-01), Dyck et al.
patent: 6433657 (2002-08-01), Chen
patent: 6516665 (2003-02-01), Varadan et al.
patent: 6529093 (2003-03-01), Ma
patent: 6686820 (2004-02-01), Ma et al.
patent: 2003/0048036 (2003-03-01), Lemkin
Royer, Daniel, et al.,Elastic Waves in Solids II, Springer-Verlag Berlin Heidelberg, (2000), pp. 253,257, and 263.
Yao, Z. J., et al., “Micromachined Low-Loss Microwave Switches”,IEEE Journal of Microelectromechanical Systems, vol. 8, No. 2, Jun. 1999, (Jun. 1999), 129-134.
Liu, Yu, et al., “Mems Capacitive Switch Design”, http://mv.ece.ucsb.edu/yorklab/Projects/MEMS/mems cap switch.html. (Jun. 2001).
Muldavin, Jeremy B., et al., “All-Metal High-Isolation Series and Series/Shunt MEMS Switches”,The IEEE Microwave and Wireless Components Letters, Feb. 15, 2001, (Feb. 15, 2004), 1-3.
Ma Qing
Shim Dong S.
Nguyen Khai
Schwegman Lundberg Woessner & Kluth P.A.
Tokar Michael
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