Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2005-05-24
2005-05-24
Noguerola, Alex (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S403010, C204S403140
Reexamination Certificate
active
06896780
ABSTRACT:
The present invention relates to a microelectrode, a microelectrode array, and a method of manufacturing the microelectrode of which temperature can be controlled. The microelectrode comprises a sealed cavity formed in a silicon substrate for thermal isolation, a microheater formed on the sealed cavity, and an electrode heated indirectly by the microheater. According to the present invention, it is possible to manufacture with CMOS process the microelectrode and the microelectrode array which have excellent electric insulation and thermal isolation between a microheater and a silicon substrate, which has a small power consumption, which has high heating and cooling speed and which has no corrosion.
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Choi Chang Auck
Jun Chi Hoon
Kim Youn Tae
Yang Hae Sik
Blakely & Sokoloff, Taylor & Zafman
Electronics and Telecommunications Research Institute
Noguerola Alex
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