Microelectro mechanical system for magneto-optic data...

Details Microelectro mechanical system for magneto-optic data... Microelectro mechanical system for magneto-optic data...

2006-02-21

2006-02-21

Pham, Long (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C438S048000

Reexamination Certificate

active

07002226

ABSTRACT:
The present invention relates to a Microelectro mechanical system structure. More specifically the invention relates to utilize a sacrificial layer to fabricate an air bearing structure, followed by forming an aperture, and reducing the aperture to nano-scale by electroplating. And then, by using of two thick film photoresist films for twice electroplating fabrication, for fabricate metal microcoils having high aspect ratio structure and interconnection metal line, to achieve efficiencies of utilizing area and reducing resistance. Moreover, proceed lithography depends on different portions and exposure dose. Then form a single photoresist film to have a specific dimension and thickness structure, finally, by using reflow process, forming a magneto-optic (MO) pickup head comprises of Supersphere Solid Immersion Lens (SSIL), nano-aperture, microcoils and air bearing by using an integrated fabrication, with advantages such as no high cost device and precise apparatus are required in the process of fabrication, mass production in batch fabrication, without step of assembly, for high-density data storage and rewritable record.

REFERENCES:
patent: 6055220 (2000-04-01), Mamin et al.
patent: 6094803 (2000-08-01), Carlson et al.
patent: 6335522 (2002-01-01), Shimada et al.

Affiliated with

Also associated with

Rating

Microelectro mechanical system for magneto-optic data... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microelectro mechanical system for magneto-optic data..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectro mechanical system for magneto-optic data... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3660322