Wave transmission lines and networks – Long line elements and components – Strip type
Patent
1997-11-17
2000-10-03
Pascal, Robert
Wave transmission lines and networks
Long line elements and components
Strip type
333202, 333262, 333263, 333105, 336 10, 338 97, 338202, 338200, 330 66, 361278, 361281, 361292, 361287, H01P 110, H01C 1006, H01G 5011, H03F 100
Patent
active
061279080
ABSTRACT:
A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode.
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Bozler Carl O.
Drangmeister Richard G.
Kushner Lawrence J.
Parr Robert J.
Massachusetts Institute of Technology
Pascal Robert
Summons Barbara
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