Microelectricalmechanical system with improved beam suspension

Details Microelectricalmechanical system with improved beam suspension Microelectricalmechanical system with improved beam suspension

2006-05-23

2006-05-23

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Balancing

C324S1540PB, C324S259000, C324S260000

Reexamination Certificate

active

07049806

ABSTRACT:
In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

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