Microdisplay pixel cell and method of making it

Details Microdisplay pixel cell and method of making it Microdisplay pixel cell and method of making it

2006-04-18

2006-04-18

Parker, Kenneth (Department: 2815)

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

C349S038000, C349S043000, C349S051000

Reexamination Certificate

active

07030952

ABSTRACT:
A plurality of active areas are defined on a semiconductor substrate. Then at least one gate is formed on the semiconductor substrate to cover a portion of the active area. Thereafter a plurality of source/drain are formed in the active area not covered by the gate followed by forming a first dielectric layer on the semiconductor substrate to cover the gate and the source/drain. After that, at least one pixel cap top plate is formed atop the first dielectric layer and a capacitor dielectric layer is formed atop the surface of the top plate. Finally, at least one pixel cap bottom plate is formed atop the first dielectric layer to cover the top plate.

REFERENCES:
patent: 6118506 (2000-09-01), Yamazaki et al.
patent: 6313481 (2001-11-01), Ohtani et al.
patent: 6677613 (2004-01-01), Yamazaki et al.

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