Microdischarge lamp

Details Microdischarge lamp Microdischarge lamp

1997-05-19

2000-01-18

Patel, Ashok

Electric lamp and discharge devices

Electrode and shield structures

Tubular or hollow sleeve

H01J 116

Patent

active

060160276

ABSTRACT:
A microdischarge lamp formed in a one piece integral substrate, preferably a silicon wafer, via micromachining techniques commonly used in integrated circuit manufacture. The lamp includes a micromachined cavity area for enclosing discharge filler, such as mercury vapor. The one piece substrate includes one or more semiconductor regions which act as electrodes for the lamp. A light transmissive cap seals the cavity area. Selection of particular aperture to length ratios for the cavity area permits the lamp to be operated either as a positive column or hollow cathode discharge. Hollow cathode discharge has been demonstrated at pressures of up to about 200 Torr. The small aperture of the cavity area, of about 1 to 400 micrometers, enable the electrons in the discharge to be ballistic. In addition, the small dimensions permit discharges based upon resonance radiation, such as the 253 nm line of atomic mercury.

REFERENCES:
patent: 3487254 (1969-12-01), Vollmer
patent: 3697797 (1972-10-01), Freyheit et al.
patent: 3908147 (1975-09-01), Hall et al.
patent: 3970887 (1976-07-01), Smith et al.
patent: 4060748 (1977-11-01), Bayless
patent: 4808883 (1989-02-01), Iwaya et al.
patent: 4890031 (1989-12-01), Zwier
patent: 4988918 (1991-01-01), Mori et al.
patent: 5438343 (1995-08-01), Khan et al.
patent: 5496199 (1996-03-01), Makishima et al.
patent: 5514847 (1996-05-01), Makishima et al.
A. D. White, "New Hollow Cathode Glow Discharge", Journal of Applied Physics, vol. 30, No. 5, May 1959, pp. 771-719.
Schoenbach et al., "Microhollow Cathode Discharge", Appl. Phys. Lett. 68(1), Jan. 1, 1996, pp. 13-15.

Affiliated with

Also associated with

Rating

Microdischarge lamp does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microdischarge lamp, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microdischarge lamp will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-565174