Microdevice valve structures to fluid control

Details Microdevice valve structures to fluid control Microdevice valve structures to fluid control

1996-11-27

1999-10-26

Lee, Kevin

Valves and valve actuation

Electrically actuated valve

Having element dimensionally responsive to field

25112901, F16K 3102

Patent

active

059713550

ABSTRACT:
A valve array system including microelectromechanical valves embedded in a dielectric substrate is disclosed. These microelectromechanical valves can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable components of valves, including electromagnetic or electrostatically actuated membranes, flaps, or beams, can be formed from laminate material using sacrifice layers and etching.

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