Microdevice processing systems and methods

Details Microdevice processing systems and methods Microdevice processing systems and methods

2007-11-20

2007-11-20

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

Reexamination Certificate

active

10771495

ABSTRACT:
Mircodevice processing systems. One exemplary embodiment includes a component for removing substrate material to form a feature into a first surface of a substrate, and a component for measuring a thickness of a portion of the substrate defining the feature, wherein the component for measuring is positioned proximate a second surface of the substrate that is different than the first surface.

REFERENCES:
patent: 6159075 (2000-12-01), Zhang
patent: 6271047 (2001-08-01), Ushio et al.
patent: 6656755 (2003-12-01), Ohkawa
patent: 2001/0008827 (2001-07-01), Kimura et al.
patent: 2001/0012108 (2001-08-01), Holzapfel et al.
patent: 2001/0023167 (2001-09-01), Kimura et al.
patent: 2002/0001861 (2002-01-01), Ohuchi
patent: 2002/0173084 (2002-11-01), Ohkawa
patent: 2002/0186381 (2002-12-01), Subrahmanyan et al.
patent: 2003/0085951 (2003-05-01), Keenan et al.
patent: 2004/0182416 (2004-09-01), Allen et al.
patent: 2004/0229389 (2004-11-01), Joei
patent: 2004/0235392 (2004-11-01), Ohta
patent: 2005/0023145 (2005-02-01), Cohen et al.
patent: 2005/0036004 (2005-02-01), Horn et al.
patent: 2384753 (2003-08-01), None
patent: 2393147 (2006-05-01), None
patent: 10160420 (1988-06-01), None
patent: 5062952 (1993-03-01), None
patent: WO2003/070415 (2003-08-01), None
patent: WO2005/016649 (2005-02-01), None

Affiliated with

Also associated with

Rating

Microdevice processing systems and methods does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microdevice processing systems and methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microdevice processing systems and methods will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3884881