Electric lamp and discharge devices – With getter
Reexamination Certificate
2005-03-15
2005-03-15
Patel, Ashok (Department: 2879)
Electric lamp and discharge devices
With getter
C313S481000, C313S549000, C313S561000
Reexamination Certificate
active
06867543
ABSTRACT:
A microdevice assembly (20) that includes a device microstructure (22), a housing (30), and a fine grain getter layer (40). The housing (30) has a base portion (32) and a lid (34). The device microstructure (22) is attached to the base portion (32) and the lid (34) is hermetically sealed to the base portion (32). The housing (30) defines a cavity (38) surrounding the device microstructure (22). The fine grain getter layer (40) is on an interior side (42) of the lid (34) for maintaining a vacuum in the cavity (38) surrounding the device microstructure (22). The lid (34) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (40) is applied. The fine grain getter layer (40) has a sub-micron grain size. There is also a method for making the microdevice assembly (20).
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Field Cheryl B.
Pfeifer Michael
Wang Joe P.
Mancini Brian M.
Miller Thomas V.
Motorola Inc.
Patel Ashok
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