Microdeflector probe for electrostatic voltmeters

Electricity: measuring and testing – Electrostatic field – Using modulation-type electrometer

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324 72, 324457, 355 14CH, G01R 2912

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active

046149082

ABSTRACT:
An electrostatic voltmeter with a microdeflector probe having a base, a flexible finger supported on the base in cantilever fashion, the finger deflecting in response to a potential difference thereacross, separate driven and variable capacitance electrodes on the finger sensing the charge voltage on the surface to be measured, the pickup electrode being electrically coupled to the driven electrode, the resulting charge voltage on the driven electrode changing finger deflection and altering the capacitive relationship between the base and the variable capacitance electrode; a predetermined reference voltage on the base; and a circuit for converting the change in capacitance between the base and the variable capacitance electrode to a signal representing the voltage on the surface. In an alternate embodiment, a second microdeflector is provided which changes capacitance between base and variable capacitance electrode in response to noise, and a control for adjusting the signal in response to the noise signal.

REFERENCES:
patent: 3997839 (1976-12-01), Dreyfus et al.
patent: 4100484 (1978-07-01), Buchceit
patent: 4197493 (1980-04-01), Juve et al.
patent: 4489278 (1984-12-01), Sawazaki
Dynamic Micromechanics on Silicon: Techniques & Devices, K. E. Petersen, IEEE Trans. on Electron Devices, vol. ED-25, No. 10, Oct. 1978, pp. 1241-1250.
The Mirror-Matrix Tube: A Novel Light Valve for Projection Displays, R. N. Thomas et al., Proceeding of the S.I.D., vol. 16/3, Third Quarter 1975, pp. 184-194.
DC Electrostatic Voltmeters and Fieldmeters, R. E. Vosteen, ES-WED-AM1, pp. 799-810.
Miniature Cantilever Beams Fabricated by Anisotropic Etching of Silicon, R. D. Jolley and R. S. Muller, Journal of Electrochemical Society, vol. 127, No. 12, Dec. 1980, p. 2750.
Micromechanical Accelerometer Integrated with MOS Detection Circuitry, K. E. Petersen et al., IEEE Trans. on Electron Devices, vol. ED-29, No. 1, Jan. 1982, pp. 23-27.

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